JPH0248784Y2 - - Google Patents

Info

Publication number
JPH0248784Y2
JPH0248784Y2 JP13281884U JP13281884U JPH0248784Y2 JP H0248784 Y2 JPH0248784 Y2 JP H0248784Y2 JP 13281884 U JP13281884 U JP 13281884U JP 13281884 U JP13281884 U JP 13281884U JP H0248784 Y2 JPH0248784 Y2 JP H0248784Y2
Authority
JP
Japan
Prior art keywords
water
cooling
cooling water
tank
cooled
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13281884U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6149280U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13281884U priority Critical patent/JPH0248784Y2/ja
Publication of JPS6149280U publication Critical patent/JPS6149280U/ja
Application granted granted Critical
Publication of JPH0248784Y2 publication Critical patent/JPH0248784Y2/ja
Expired legal-status Critical Current

Links

JP13281884U 1984-08-31 1984-08-31 Expired JPH0248784Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13281884U JPH0248784Y2 (en]) 1984-08-31 1984-08-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13281884U JPH0248784Y2 (en]) 1984-08-31 1984-08-31

Publications (2)

Publication Number Publication Date
JPS6149280U JPS6149280U (en]) 1986-04-02
JPH0248784Y2 true JPH0248784Y2 (en]) 1990-12-20

Family

ID=30691373

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13281884U Expired JPH0248784Y2 (en]) 1984-08-31 1984-08-31

Country Status (1)

Country Link
JP (1) JPH0248784Y2 (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015001372A (ja) * 2013-06-17 2015-01-05 ファイン セミテック コーポレーション 半導体プロセス用冷却装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015001372A (ja) * 2013-06-17 2015-01-05 ファイン セミテック コーポレーション 半導体プロセス用冷却装置

Also Published As

Publication number Publication date
JPS6149280U (en]) 1986-04-02

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